By Minhang Bao

Sensors and actuators at the moment are a part of our daily life and seem in lots of home equipment, akin to vehicles, merchandising machines and washing machines. MEMS (Micro Electro Mechanical platforms) are micro structures which includes micro mechanical sensors, actuators and micro digital circuits. a number of MEMS units were constructed and plenty of mass produced, however the info on those is broadly dispersed within the literature. This ebook offers the research and layout ideas of MEMS units. the knowledge is entire, targeting microdynamics, resembling the mechanics of beam and diaphragm buildings, air damping and its impact at the movement of mechanical buildings. utilizing functional examples, the writer examines difficulties linked to research and layout, and strategies are incorporated in the back of the e-book. the appropriate complicated point textbook for graduates, Analysis and layout ideas of MEMS Devices is an acceptable resource of reference for researchers and engineers within the box.

* provides the research and layout ideas of MEMS units extra systematically than ever before.

* contains the theories crucial for the research and layout of MEMS comprises the dynamics of micro mechanical structures

* an issue part is integrated on the finish of every bankruptcy with solutions supplied on the finish of the booklet.

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2. Torsion bar optical switch (a) schematic picture; (b) cross section view (2) Optical Switch With Comb Drive Actuator For optical communication applications, optical switches are often arranged in arrays. For the switches shown in Fig. 2, light beams travel out of the surface plane of the 20 Chapter 1. Introduction to MEMS Devices device. This operation mode facilitates the formation of a multi-in and multi-out (NxM) switch array. However, the alignment of the light beams to specific directions is difficult.

Similar anisotropic conditions appear for shearing modulus G and Poisson ratio vtoo. 51 lxlO 11 Pa for Txy. 36 for the z'-direction. ), some approximate values for mechanical parameters will be used in this book for the simplicity of calculation. 65xl0 n Pa. 2. 1. Stress, Strain in a Bent Beam Consider a thin straight beam with a rectangular cross section of width b and thickness h. The length of the beam L is much larger than b and h. A coordinate system is taken with its origin at the center of a cross section and the x-axis along the beam.

Stress and Strain 35 tangential forces in the x - and z -directions on the y -plane are defined as positive and those by the forces in the x- and z- directions on the y -plane are defined as negative. According to the condition of force balance, the Txx in two opposite parallel planes (xand x -planes) should be equal in quantity and sign, and the same is true for the Tyy and the Tzz- Also from the condition of torque balance, we have TXY ~ Tyx, TYZ = TZY, Txz = Tzx (2-1-2) This means that the matrix of stress tensor T is symmetric and has only six independent components.

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